Japanese digital Mass Flow Controller, EX-550 Series

Place of Origin:

Japan

Brand Name:

Kofloc

Model Number:

EX-550

Type:

Variable Area Air & Gas Flowmeters

Sensor type:

Thermal sensor

Applicable gases:

N2, Air, H2, He, Ar, O2, CO2 (The other gases are N2 gas conversion)

Flow range:

10SCCM-5SLM

Control range:

2-100% (F.S.)

Accuracy:

±1.0%S.P. (25%F.S.-100%F.S.) , ±0.25%F.S. (-25%F.S.)

Repeatability:

±0.2%FS

Inlet maximum pressure:

350kPa (G)

Proof pressure:

980kPa (G)

Working temp.:

5-50°C